A major reason for performing microanalysis in the Field-Emission Gun Scanning Transmission Electron Microscope (FEG-STEM) is the very high spatial resolution of the information obtained. It has been estimated that in ideal cases, energy-dispersive x-ray analysis in such an instrument can provide 0.1 wt.% detection sensitivity for an element in a region about 1.5nm in diameter of a foil about 30nm thick. It is obvious that such performance requires that the instrument be properly adjusted, and hence that the probe-forming characteristics be fully understood.
There are three fundamental limits on the minimum size of an electron probe, these being i) the geometrical demagnification of the source, ii) diffraction at the beam-limiting aperture, and iii) spherical aberration in the probe-forming lens. In addition, misalignment of the beam-limiting aperture will result in probe aberrations.